The goal of Our
remanufacturing process:

To produce furnace and LPCVD systems that meet or exceed all of the original OEM equipment standards, at a considerable savings to the customer.”

Whether you are matching an existing Thermco or BTI/Bruce tool set for capacity or process expansion,  the value of high quality remanufactured furnace systems can make a big difference to your fab equipment budget. 

Expertech can produce an exact match to nearly any version of original equipment currently in operation.   Savings on maintenance “learning curve expense,”  operations training,  process recipe development, and duplication of spare parts can be a considerable boost to the bottom line cost of furnace operation.

Expertech’s Horizontal Furnace Remanufacturing Process

• The remanufacturing cycle begins with customer agreement on final specifications and submittal of a purchase order.
• A system matching customer specifications is selected from an inventory of several hundred used horizontal furnaces.

• Engineering generates a complete package of facilities and gas tray drawings.
• Once the customer has signed off on the entire set of drawings, the remanufacturing process can begin.

• Each system is completely disassembled down to component level.
• All panels are Inspected and replaced as required.
• All frames and panels are sandblasted down to bare metal. The bare metal is then phosphoric acid dipped, primer painted, and urethane coated to customer-specified colors.
• All stainless steel paneling is chemically cleaned and electro-polished or replaced as required.
• All reassembly is done with stainless steel fasteners and hardware.

• All systems undergo stringent board level testing. All boards not meeting OEM specifications are repaired and/or replaced.
• Where applicable, system PC boards are reconfigured as required to incorporate necessary process safety interlocks and functions.
• Where applicable, all software upgraded to most current revision. However, older revisions of software can be provided at specific customer requests.

• Due to the importance and process-specific nature of the gas systems/source cabinets, all gas systems are rebuilt as follows:
• All gas systems are constructed in a 600sqft, class 100 clean room environment.
• All tubing is new electro-polished 316 stainless steel configured to specific process applications.
• Only new gas pressure regulators, inlet gas filters, inline filters and point-of-use filters are used in the construction of gas trays and source cabinet plumbing.
• All welds are done using an Orbital welder.
• Only Micro-fit fittings are used in the construction of gas trays.
• VCR fittings are used at all removable connection points. Swagelok and Teflon compression fittings are used on all Atmospheric outlet points.
• New or remanufactured pneumatic valves and mass flow controllers can be used at the customer's discretion..
• All source cabinet plumbing and gas trays are Helium leak tested to 1x10-8cc/He to ensure process gas delivery is pure and safe.

• New elements are installed if specified by customer. If selected, used elements are guaranteed.
• New or Used spike thermocouples, vestibule blocks, and soft collars are used.
• All power components are verified to perform to or exceed OEM specifications or they are replaced.
• Load station pre-filters and HEPA filters are replaced.

• All sub-assemblies (furnace cabinet, load station, source cabinet, and control cabinet) are assembled in the sub-assembly area of the factory.
• Before moving to integration, each sub-assembly is fully tested to original equipment specifications.

• All sub-assemblies are integrated in the final test area of the facility.
• All fully integrated systems are.tested and verified to perform to OEM specifications.
• After successfully passing Final Test, customers are offered an opportunity to source inspect their system prior to disassembly and shipment.