|
|
|
|
|
Remanufactured Diffusion & LPCVD Furnaces |
| The HF-Series wafer processing
systems are designed for our customers who require high through-put
production tools in fabs where the longer flat zones and larger wafer load
sizes ensure reduced cost per wafer. For all high volume production processes, from sub-micron to large feature devices, wherever horizontal furnace systems make good economic sense in the fab tool set, the Expertech HF-Series systems are a proven workhorse solution to large-batch processing requirements. These furnace and LPCVD systems are manufactured to the highest quality standards, in our state of the art facility, using the most recent innovations in wafer processing equipment. Key to our goal of "building the best" is finding the best fit of design for each customers application and budget. Outstanding performance, reliability, long equipment life span, and low total cost of ownership are built into every tool. |
|
|
|
|
