Remanufactured Vertical Furnaces
Expertech provides the following services on a large inventory of SVG/Thermco VTR6000 and VTR7000 Vertical furnaces:
Wafer size conversions.
  • 100mm
    •
  • 125mm
  • 150mm
  • 200mm
Process conversions from Atmospheric to LPCVD and LPCVD to Atmospheric including:
  • H2 Anneal
  • Doped Poly-Silicon (P and N doped)
  • Poly-Silicon (Flat Poly, Amorphous Poly)
    •
  • Wet/Dry Oxidation
  • Nitride Deposition
  • TEOS Deposition
  • HTO/LTO Deposition
Rebuild/Replace/Modify Gas delivery Panels to meet customer specific process requirements.

3 to 5 Zone Element Conversions.

SEMY Mypro controller conversions and upgrades.

Pressure control system upgrades and conversions including:
  • 2" to 3" vacuum foreline conversions using customer preferred vacuum control components.
  • N2 ballast to Throttle valve pressure control conversions.
  • Non-heated and Heated pressure control options.
  • Manometer pressure range conversions.
  • Positive pressure control upgrades for sensitive Atmospheric processes.
Want to know more? Contact Expertech