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Semiconductor Diffusion Furnace Applications

Semiconductor, SiC, GaN & MEMS device processing is highly demanding of film uniformity and low defect density. Expertech has over 30 years of experience providing innovative equipment and process support for your semiconductor applications. Whether you need to introduce a new film type or need to augment production capacity for an existing process, Expertech can help in providing a viable solution.

Expertech can provide one or more horizontal or vertical furnace systems configured for growing/depositing the following semiconductor device processing steps:

LPCVD Processes

Stochiometric Nitride (Si3N4)
Anti-reflection coatings (ARC)
Low Stress Nitride (Si Rich Nitride) < 250 MPa
Ultra-low Stress Silicon Nitride < 100 MPa
Undoped Polysilicon or α-Silicon
Phosphorous Doped Polysilicon or α-Silicon
Boron Doped Polysilicon or α-Silicon
Undoped Poly-SiGe
Phosphorous or Boron Doped Poly-SiGe
Undoped Low Temperature Oxide (LTO)
Phosphorous Doped Glass (PSG)
Boron and Phosphorous Doped Glass (BPSG)
Undoped deposited oxide by TEOS
Phosphorous Doped TEOS Oxide (PSG)
Boron and Phosphorous Doped TEOS (BPSG)

Atmospheric Pressure Processes

Wet or Dry Oxidation/Densification
Dry/wet/dry Gate Oxide Cycles
Inert Gas Anneals/Densification (N2, Ar, He)
Contact Sintering / Alloy (N2, Forming Gas)
Reducing Atmosphere Anneals (Forming Gas)
Phosphine + O2 phosphorus doping
Phosphine gas phase doping
POCl3 + O2 – liquid source phosphorus doping
BBr3 + O2 – liquid source boron doping
Solid Source Phosphorous Doping
Solid Source Boron Doping
Drive-in / Redistribution

Contact Expertech for High-Performance Semiconductor Diffusion Furnace Solutions

Since 1992, Expertech has manufactured high-performance semiconductor diffusion furnaces. Delivering capabilities for various applications such as LPCVD and Atmospheric Pressure Processes, and Expertech systems can match production requirements in your thermal processing operations. Providing an extensive inventory of systems and parts, Expertech can additionally develop custom solutions, train staff, and repair or refurbish systems to meet your needs for high-quality semiconductor processing.