Who We Are

Founded in 1992, Expertech has provided quality, newly manufactured and refurbished thermal processing systems. With hundreds of fully designed and manufactured systems by Expertech and an additional 500 refurbished systems in the field, Expertech has earned a reputation as an industry leader for thermal diffusion furnaces.  We provide field service, repair parts, and upgrades for thermal systems manufactured by us and other OEM suppliers.

At our founding, we supported thermal process applications for the semiconductor industry. Since 1995, Expertech has been adapting systems and making custom-designed products to serve additional industries, including MEMS, photovoltaics, sensors, and optical coatings.

Horizontal & Vertical Thermal Reactors

Expertech started as a designer and refurbisher of horizontal thermal reactor (HTR) systems. With success in that field, we turned to the vertical furnace market. Initially developed by Silicon Valley Group, Inc., the vertical thermal reactor (VTR) has over 800 systems shipped worldwide. Expertech has provided refurbished VTR systems, upgrades, parts, and service support for VTR equipment since 1993.

In 2008, took over the OEM responsibilities for the VTR 6000, 7000 and 7000+.  Expertech continues to support existing customers through spare parts and upgrades, while offering refurbished tools worldwide.

Compact Thermal Reactors

Expertech has designed and developed its Compact Thermal Reactor (CTR) systems in 2008.  These reduced footprint systems have been widely accepted in Universities worldwide, as well as production facilities.

At Expertech headquarters, we have the capacity for:

  • System engineering
  • Production planning and logistics
  • Assembly and testing
  • Marketing
  • Spare parts logistics
  • Field service management
  • Sales management
  • Training

Our senior management has over 100 combined years of industry knowledge, establishing us as leading experts in the field. In addition to our headquarters in Scotts Valley, California, we provide services worldwide. Expertech’s global sales organization covers North America, Europe, and Asia. Our field service team, technical support, and parts depots service the same regions.