Vertical Diffusion Furnace Systems for MEMS
With decades of experience manufacturing the latest thermal reactors and refurbished systems, Expertech develops high-technology diffusion furnaces for processing MEMS. Our team has provided over 1500 furnace process tubes and more than 100 vertical furnaces, including new, remanufactured, certified used, and as is to suit a range of thermal processing applications for various industries. CTR and VTR systems offer atmospheric and LPCVD capabilities to meet your needs.
CTR Diffusion Furnaces for MEMS Applications
Compact diffusion furnaces for processing MEMs offer powerful automated technology in a tiny footprint. Able to process up to 200 mm round, 156 mm square, or irregularly shaped substrates with the same process method as full-size platforms, CTR systems capabilities can surpass tabletop or laboratory furnace systems with exceptional film quality and process uniformity. The CTR delivers superior process performance with full recipe control and storage via a host PC supervisor, high-technology data logging, and graphic capabilities with manual or fully automated loading systems to offer the following benefits:
- Reliable, Fully Automated Technology
- High-Performance Heating Components
- Atmospheric & LPCVD Configurations
- Totally Outfitted with Safety Interlocks
- Integrated Control System with GUI for Interfacing with Multiple Tools
- Smallest Footprint in Equipment Class with a Compact Design
- Stackable Design Accommodates 4 CTR-125, 4 CTR-150, 3 CTR-200, and variable in CTR-300
- Includes Process Controller Options
- Controlled Rate of Wafer Load and Unload with Optional Recipe Controlled Loading Mechanism
- Low Cost of Ownership
VTR Diffusion Furnaces for MEMS Processing
Vertical diffusion furnaces for MEMs processing offer robust design features with a small footprint. As one of the most well-known furnace designs worldwide, the VTR system is a highly automated reactor with exceptional within-wafer and wafer-to-wafer uniformity in atmospheric and LPCVD applications. The VTR is an exceptional solution for advanced MEMs processing, providing benefits such as:
- Processing Versatility
- Higher Automation & Throughput
- Optimal Contamination Control
- Lower Cost-of-Ownership
Applications of Diffusion Furnaces for Processing MEMS
Using processes on silicon adapted from the semiconductor industry, MEMS devices are manufactured to provide small-scale sensors, actuators, accelerometers, and gyroscopes. They typically require thicker films with low intrinsic stress, uniform properties, and excellent step coverage. With vast technical expertise, Expertech develops CTR or VTR diffusion furnaces to help rapidly characterize your MEMS film processing, offering device processing steps, including:
LPCVD Processes
- Low-Stress Nitride (Si Rich Nitride) < 250 MPa
- Ultra-Low Stress Silicon Nitride < 100 MPa
- Undoped Polysilicon or a-Silicon
- Phosphorous-Doped Polysilicon or a-Silicon
- Boron-Doped Polysilicon or a-Silicon
- Undoped Poly-SiGE
- Phosphorous or Boron-Doped Poly-SiGE
- LTO
- TEOS
Atmospheric Pressure Processes
- Wet or Dry Oxidation/Densification
- Inert Gas Anneals/Densification (N2, Ar, He)
- Reducing Atmosphere Anneals
Contact Us for High-Technology MEMS Processing Diffusion Furnaces
Expertech is a thermal processing equipment manufacturer and servicer with over 30 years of experience. Maintaining one of the largest inventories of thermal reactor parts for current and obsolete systems, we offer modification, repair, and improved functionality for your systems, as well as training opportunities to meet the needs of your facility. We provide new and refurbished vertical, compact, and horizontal diffusion furnaces for processing MEMS with atmospheric and LPCVD capabilities for high-quality, consistent operations and uniform properties. Contact Expertech to discuss your MEMs processing requirements or request a quote to begin.