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Spares & Support Service

Spares & Repair Parts

For new and installed diffusion furnaces.

Parts in Stock

Expertech maintains a stock of the commonly needed parts for Expertech manufactured systems and can usually ship common repair parts from stock. This includes VTR parts for systems built by SVG/Thermco and now supported as an Expertech product. Special programs for consignment parts are available.

Obsolete & Hard-to-Find Parts

For repair parts for thermal systems built by other manufacturers, Expertech has a strong supply chain through which it can obtain parts for a variety of systems including obsolete or hard-to-find parts.

Contact us at info@exper-tech.com, or by phone at 831-439-9300 and ask for the Customer Service Department and specify the part you are seeking.

Repair of Customer Parts

Expertech has the capability and skills at its factory to repair, recalibrate, and return customer parts such as:

  • circuit boards,
  • temperature controlled bubblers and
  • vapor controller chemical delivery systems.

Prior to shipping us your part, contact us at webparts@exper-tech.com, or by phone at 831-439-9300, and ask for the Repair Department and specify the type part and the service needed.

Second Sourcing for Obsolete Parts

Expertech has developed a broad knowledge of available subsystems and component parts which can be substituted for obsoleted components, for example:

  • circuit boards containing obsolete components
  • chemical delivery subsystems

If you are trying to repair a thermal system but need an obsoleted part, contact us at info@exper-tech.com, or by phone at 831-439-9300, and ask for the Customer Service Department and specify the part you are seeking.

Find High-Performance Reactor Solutions and Diffusion Furnaces at Expertech

Expertech is a manufacturer of diffusion furnaces offering over 30 years of experience. Beyond spare parts and reactor systems, we can provide high-quality refurbishing services, repair and maintenance, and OEM training sessions to ensure the longevity and performance of your thermal reactors. With high-technology equipment innovations, discover proven thermal processing solutions for semiconductor diffusion.

Contact Expertech for more information on our thermal reactor systems or request a quote to begin.